99.7% alumina ceramic wafer polishing plate yeCMP

Chemshunndiro yekupukuta yealumina wafer/turn table yakagadzirwa ne 99.7-99.9% alumina yakachena. Alumina ceramic yakasimba ine kusimba kwakanyanya uye inodzivirira kupfekwa zvakanaka pakupukuta wafer uye inochengetedza chimiro chakanaka chepamusoro kwenguva yakareba. Yakaumbwa nePIBM. Inhengo yeindasitiri ye semiconductor nekuda kwekugadzikana kwayo kusingaenzaniswi kwekupisa uye mativi uye kuramba kuchengetedzwa kwemidziyo yekugadzira microchip zvakanyanya.

Kuronga-Michina kweChemical-Mechanical (CMP), inozivikanwawo seChemical-Mechanical Polishing, inyanzvi yekugadzira michina ye semiconductor. Inoshandisa ngura yemakemikari uye simba remakanika kuti ipfavedzere mawafer esilicon kana zvimwe zvinhu zve substrate panguva yekugadzirisa.

Midziyo yeCMP yakakamurwa zvikuru kuita zvikamu zviviri: chikamu chekupukuta nechikamu chekuchenesa. Chikamu chekupukuta chine zvikamu zvina, zvinoti matatu ekupukuta turntables uye module yekurodha nekuburitsa wafer. Chikamu chekuchenesa ndicho chine basa rekuchenesa nekuomesa wafer kuti wafer "iome uye iome" mukati mewafer. Mumidziyo yese yekupukuta, alumina ceramics inoita basa rakakosha.

Zviumbwa zveAlumina zvinowanzo shandiswa kugadzira madhisiki ekupukuta ewafer, ayo anoda kuchena kwakanyanya, kugara kwenguva refu kwemakemikari, uye kudzora kwakanaka chimiro chepamusoro uye kuomarara.

Chemshun 99.7% Al2O3 ceramic grinding disc yakagadzirwa nezvinhu zvemhando yepamusoro zve ceramic, izvo zvakakodzera kukuya zvinhu zvakasiyana-siyana, kunyanya kukuya zvinhu zvisina kusimba zvakaita sewafers, ceramics negirazi. Ceramics grinding disc yedu inogona kugadzirwa muhukuru hwakasiyana zvichienderana nemhando dzakasiyana dze grinding nekupukuta.