Chii chinonzi ndiro yekupukuta yealumina ceramic wafer yakachena kwazvo?

Nekukura kuri kuita indasitiri yesemiconductor nekukurumidza, kukura kweindasitiri kwakawedzera nekukurumidza, uye michina yekugadzira semiconductor yakaramba ichichinja kuita chaiyo uye yakaoma. Nekuti ceramics dzine zvakanakira zvekuomarara kwakanyanya, elastic modulus yakakwira, high wear resistance, high insulation, corrosion resistance, low expansion, nezvimwewo, inogona kushandiswa sezvikamu zvemuchina we silicon polishing, epitaxial/oxidation/diffusion heat treatment, lithography muchina, deposition equipment, semiconductor etching equipment, ion implantation machine nezvimwe zvishandiso, saka kutsvagisa nekugadzira nekugadzira zvikamu zve ceramic zvine chekuita zvakananga nekukura kweindasitiri ye semiconductor. Zvinodiwa zvehunyanzvi zvekugadzirira kwayo zviri kuramba zvichikwira.

Alumina yakachena kwazvo, 99.7% -99.9% alumina.
Simba guru remuchina, kuramba kupfeka zvakanyanya, kudzivirira kupisa kwakanyanya, kudzikamisa magetsi zvakanyanya, kugadzikana kwemakemikari kwakanyanya, kuramba kupisa kwakanaka uye kuramba ngura. Parizvino, kushandiswa kwe ceramic grinding disc semiconductor silicon wafer ndiyo nzira yepamusoro uye yemazuva ano yekukuya. Maitiro ekukuya ane mativi maviri anoshandiswa kukuya silicon wafer yakachekwa, uye mhando ye grinding wafer inovandudzwa nekuvandudza maitiro ekukuya (disc material, grinding fluid, grinding pressure uye grinding speed, nezvimwewo). Kunyanya, kushandiswa kwema ceramic plates pachinzvimbo chema cast iron plates, kudzivirira kukuya pamusoro pe wafer inokonzerwa nemavanga kana kusvibiswa, kuderedza kuiswa kwema ions esimbi, kunogona kuderedza kugadziriswa kwe silicon kunotevera, kupfupisa nguva yekushanda (corrosion), kuvandudza kushanda zvakanaka kwekugadzira, uye kuderedza kurasikirwa kwe silicon processing, kuvandudza zvakanyanya kushandiswa kwe silicon.

Ndiro yekupukuta yealumina wafer ine alumina yakawandaInoshandiswa mumaindasitiri e semiconductor, petroleum, makemikari, photovoltaic, liquid crystal nedzimwe nzvimbo, dzakadai sezvikamu zvemakanika, zvikamu zvemagetsi, microwave induction disk, zvinhu zvekudzivirira kupisa nezvimwe zvikamu, zvishandiso zve semiconductor, michina ye vacuum, michina yekugadzira liquid crystal nezvimwe zvikamu. Saizi hombe uye kuchena kwakanyanya kwe alumina ceramics zvine kukosha kwakakosha muindasitiri ye sapphire uye indasitiri yema chip e semiconductor. Inotsigira zvikuru uye inoshandisika pakupukuta kwemakemikari (CMP) kwema wafers e sapphire ne semiconductor silicon. Saizi hombe uye kuchena kwakanyanya kwe alumina ceramics inogonawo kushandiswa se alumina substrate yeLCD.